The 66th JSAP Spring Meeting, 2019

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)

9:30 AM - 9:45 AM

△ [10a-M114-3] Double-gate Cu-MIC poly-Ge thin-film transistors on PI formed by spin coating

〇(M2)Hiroki Utsumi1, Akito Hara1 (1.Tohoku Gakuin Univ.)

Keywords:thin-film transistor, poly-Ge, PI