[10p-M116-1~22] 9.1 Dielectrics, ferroelectrics

[10p-M116-5] Characterization of thickness shear mode vibration of gehlenite single crystals
for high temperature microbalance application

〇Takuto Oshima¹, Takuya Hoshina¹, Takaaki Tsurumi¹, Hiroaki Takeda¹ (1.Tokyo Tech.)

Keywords:piezoelectric materials

In this study, we demonstrated the possibility for high temperature microbalance application using gehlenite single crystals. The crystals exhibit stable piezoelectric properties at high temperature and possess the lower density compared to langasite-type crystal. We firstly characterized thickness shear vibration (d’₁₅ mode) of the gehlenite crystals. The (XYw)45°-cut substrate showed the highest d’₁₅ constant. Using this substrate, we formed electrodes and then deposited LiZrO₃ thin film. Since the LiZrO₃ absorb CO₂ gas efficiently, mass of the film should become heavier. The LiZrO₃-deposited substrate clearly showed resonance frequency shit by the reaction with CO₂ gas in air atmosphere at 500^oC. Therefore, we judged gehlenite single crystals can be applied for microbalance application at high temperature.