The 66th JSAP Spring Meeting, 2019

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[10p-W541-1~20] 15.4 III-V-group nitride crystals

Sun. Mar 10, 2019 1:30 PM - 7:00 PM W541 (W541)

Motoaki Iwaya(Meijo Univ.), Yoshio Honda(Nagoya Univ.), Shugo Nitta(Nagoya Univ.)

1:45 PM - 2:00 PM

△ [10p-W541-2] Characterization of UV device using TMAH wet etching for mirror formation

〇Shinji Yasue1, Kosuke Sato1,2, Yuta Kawase1, Junya Ikeda1, Yusuke Sakuragi1, Sho Iwayama1, Motoaki Iwaya1, Satoshi Kamiyama1, Tetsuya Takeuchi1, Isamu Akasaki1,3 (1.Meijo Univ., 2.Asahi-Kasei, 3.Akasaki Research Center, Nagoya Univ.)

Keywords:UV device