The 66th JSAP Spring Meeting, 2019

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[11p-M136-1~14] 13.3 Insulator technology

Mon. Mar 11, 2019 1:15 PM - 5:15 PM M136 (H136)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo), Kiyoteru Kobayashi(Tokai Univ.)

4:15 PM - 4:30 PM

▲ [11p-M136-11] Crystallization of GeO2 on Ge is really triggered by GeO desorption?

〇Min Xie1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.Univ. Tokyo)

Keywords:germanium, GeO2