3:45 PM - 4:00 PM
[11p-W641-8] Transition Metal (Ni, Co) Thermal Etching by Hexafluoroacetylacetone (hfac)
Keywords:Transition Metal, Atomic layer etching
Presentation information
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)
Daisuke Ogawa(Chubu Univ.), Kazunori Shinoda(HITACHI)