Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)
Daisuke Ogawa(Chubu Univ.), Kazunori Shinoda(HITACHI)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:45 PM - 2:00 PM
〇Takashi Hamano1, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ.)
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2:00 PM - 2:15 PM
〇Tomohiro Kuyama1, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ.)
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2:15 PM - 2:30 PM
〇Shota Nunomura1, Isao Sakata1, Koji Matsubara1 (1.AIST RCPV)
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2:30 PM - 2:45 PM
〇Yoshinori Kodama1, Yoshifumi Zaizen1, Masanaga Fukasawa1, Katsuhisa Kugimiya1, Kojiro Nagaoka1 (1.Sony Semiconductor Solutions)
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2:45 PM - 3:00 PM
〇(M2)Charisse Cagomoc1, Michiro Isobe1, Satoshi Hamaguchi1 (1.Osaka University)
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3:00 PM - 3:15 PM
〇Kazumasa Ikuse1, Hiori Kino2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.NIMS)
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3:15 PM - 3:30 PM
〇Toshio Hayashi1, Makoto Sekine1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ.)
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3:45 PM - 4:00 PM
〇Tomoko Ito1, Karahashi Kazuhiro1, Satoshi Hamaguchi1 (1.Osaka Univ.)
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4:00 PM - 4:15 PM
〇Kazuhiro Karahashi1, Tomoko Ito1, Junichi Hashimoto2, Mitsuhiro Omura2, Hisataka Hayashi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Toshiba Momory Corporation)
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4:15 PM - 4:30 PM
〇Yoshiki Shirasu1, Takuhiro Ando1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
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4:30 PM - 4:45 PM
〇(M1)Jiawei Ni1, Toshio Hayashi1, Kenji Ishikawa1, Takayoshi Tsutsumi1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya University)
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4:45 PM - 5:00 PM
〇Kenji Miyashita1, Toru Tsunoura1, Katsumi Yoshida1, Toyohiko Yano1 (1.Tokyo Tech)
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5:00 PM - 5:15 PM
〇(PC)Daisuke Ohori1, Shuichi Noda2, Takuya Fujii1, Wataru Mizubayashi2, Kazuhiko Endo1,2, En-Tzu Lee1, Yiming Li3, Yao-Jen Lee4, Takuya Ozaki1, Seiji Samukawa1,2,5 (1.IFS, Tohoku Univ., 2.AIST, 3.NCTU, 4.NDL, 5.AIMR, Tohoku Univ.)
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5:15 PM - 5:30 PM
〇Yuta Sugimoto1, Masashi Yamage1, Yoshie Okamoto2, Tomoaki Yoshimori2, Hidetada Azumano2 (1.TOSHIBA, 2.SHIBAURA MECHATRONICS)
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