[9a-PA3-1~10] 22.1 Joint Session M "Phonon Engineering"

[9a-PA3-2] Electron-beam heating for thermal conductivity evaluation by SEM/thermography system

〇Hiroya Ikeda¹, P. Baskaran^1,2, Yuya Ota¹, Ryo Nanao¹, Ko Akiba¹, Yuto Goi¹, Motohiro Tomita³, Takashi Matsukawa⁴, Takeo Matsuki^3,4, Takanobu Watanabe³, Yuhei Suzuki¹, K.D. Nisha², Hiroshi Inokawa¹, Masaru Shimomura¹, Kenji Murakami¹ (1.Shizuoka Univ., 2.SRMIST, 3.Waseda Univ., 4.AIST)

Keywords:thermal conductivity, thermoelectrics, nanostructure

In order to evaluate the thermal conductivity for micrometer- and nanometer-scale materials, we are constructing a novel measurement technique with scanning-electron-microscopy/infrared-thermography system. In the present study, as a first stage, we confirmed the sample heating by electron-beam irradiation.