The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

22 Joint Session M ”Phonon Engineering” » 22.1 Joint Session M "Phonon Engineering"

[9a-PA3-1~10] 22.1 Joint Session M "Phonon Engineering"

Sat. Mar 9, 2019 9:30 AM - 11:30 AM PA3 (PA)

9:30 AM - 11:30 AM

[9a-PA3-2] Electron-beam heating for thermal conductivity evaluation by SEM/thermography system

Hiroya Ikeda1, P. Baskaran1,2, Yuya Ota1, Ryo Nanao1, Ko Akiba1, Yuto Goi1, Motohiro Tomita3, Takashi Matsukawa4, Takeo Matsuki3,4, Takanobu Watanabe3, Yuhei Suzuki1, K.D. Nisha2, Hiroshi Inokawa1, Masaru Shimomura1, Kenji Murakami1 (1.Shizuoka Univ., 2.SRMIST, 3.Waseda Univ., 4.AIST)

Keywords:thermal conductivity, thermoelectrics, nanostructure

In order to evaluate the thermal conductivity for micrometer- and nanometer-scale materials, we are constructing a novel measurement technique with scanning-electron-microscopy/infrared-thermography system. In the present study, as a first stage, we confirmed the sample heating by electron-beam irradiation.