9:30 AM - 9:45 AM
△ [10a-Z24-4] Fabrication of MFSFET with ferroelectric non-doped HfO2 utilizing Hf interfacial layer
Keywords:ferroelectric, HfO2, MFSFET
Presentation information
Oral presentation
CS Code-sharing session » 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5
[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5
Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24
Hironori Fujisawa(Univ. of Hyogo), Shosuke Fujii(Kioxia)