9:15 AM - 9:30 AM
[13a-A205-2] Plasma diagnostics of carbon-HiPIMS for depositing DLC film
Keywords:diamond like carbon film, sputtering
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Mar 13, 2020 9:00 AM - 10:30 AM A205 (6-205)
Kosuke Takenaka(Osaka Univ.)
9:15 AM - 9:30 AM
Keywords:diamond like carbon film, sputtering