The 67th JSAP Spring Meeting 2020

Sessions

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Oral presentation

[12p-A205-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Takayuki Ohta(Meijo Univ.), Masanaga Fukasawa(Sony Semiconductor Solutions), Taku Iwase(日立製作所)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[13a-A205-1~6] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Mar 13, 2020 9:00 AM - 10:30 AM A205 (6-205)

Kosuke Takenaka(Osaka Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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