4:15 PM - 4:30 PM
[15p-A201-13] High-temperature characteristics of 4H-SiC(0001) pMOSFET fabricated with ultrahigh temperature processes and its application to CMOS
Keywords:SiC, pMOSFET, CMOS
Presentation information
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)
[15p-A201-1~15] 15.6 Group IV Compound Semiconductors (SiC)
Sun. Mar 15, 2020 1:00 PM - 5:00 PM A201 (6-201)
Mitsuru Sometani(AIST), Munetaka Noguchi(Mitsubishi Electric)