4:15 PM - 4:45 PM
[11p-S301-6] Status and prospects of atomic layer etching
Keywords:etching, plasma, Atomic Layer Etching
Presentation information
Symposium (Oral)
Symposium » Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)
Makoto Sekine(Nagoya Univ.), Jaeho Kim(AIST)