The 68th JSAP Spring Meeting 2021

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13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

Kazuhiko Endo(AIST), Kimihiko Kato(AIST)

4:15 PM - 4:30 PM

△ [17p-Z26-9] Direct imaging of crystallographic tilting in isotopically controlled 28Si/SiGe substrate

〇Koichi Takeuchi1, Satoru Miyamoto1,2, Kohei Itoh2, Noritaka Usami1 (1.Nagoya Univ., 2.Keio Univ.)

Keywords:Si qubit, SiGe, Transmission Electron Microscope (TEM)