[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-2] Plasma polymers are affected by chemical structure of monohydric alcohols.

〇Kohshi Taguchi¹, Kashiwagi Daiki¹, Yamahara Motohiro¹, Noborio Kazuyuki¹ (1.SAKIGAKE-Semiconductor Co., Ltd.)

Keywords:plasma polymer, monohydric alcohol, FT-IR

The effect of structural differences in the alcohol feedstock on the structure of the plasma polymer produced was investigated using monohydric alcohols. plasma polymers were deposited from a mixture of glycerin, a trihydric alcohol, and monohydric alcohols in CVD deposition. The structure was attributed from FT-IR spectra, and absorption derived from the structure of the tertiary carbon was confirmed for the monohydric alcohol with the tertiary carbon. The detailed argument will be discussed on the day of the presentation.