The 69th JSAP Spring Meeting 2022

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Symposium (Oral)

Symposium » Introducing 2D Layered Materials into LSI World!

[24p-E304-1~10] Introducing 2D Layered Materials into LSI World!

Thu. Mar 24, 2022 1:00 PM - 5:45 PM E304 (E304)

Hirokazu Fukidome(Tohoku Univ.), Takeo Matsuki(AIST)

3:30 PM - 4:00 PM

[24p-E304-8] Integration Technologies for 2D Semiconductor Devices

〇Hitoshi Wakabayashi1 (1.Tokyo Tech)

Keywords:Semiconductor