1:30 PM - 1:45 PM
[17p-A205-3] Impact of nitrogen and water vapor addition on silicon nanocone formation by micro-wave hydrogen plasma
Keywords:micro wave plasma, black silicon, solar cell
Presentation information
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Mar 17, 2023 1:00 PM - 5:45 PM A205 (Building No. 6)
Kazuhiro Karahashi(Osaka univ.), Sumiko Fujisaki(Hitachi, Ltd.)