[17p-A205-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17p-A205-4] Technology for long-term retention of surface modification properties by plasma.

〇Kohshi Taguchi¹, Motohiro Yamahara¹, Mina Tomikawa¹, Kazuyuki Noborio¹ (1.SAKIGAKE-Semiconductor Co., Ltd.)

Keywords:Plasma, SAM, Hydrophilic

Traditionally, SAMs (Self-Assembled Monolayer; self-assembled monolayer) have been formed mainly by a wet process after activation of the sample surface by plasma or other means. We have developed a technology that enables the formation of SAMs in a short time and the long-term retention of surface modification properties through the application of plasma.