[1Ga01-10] Thin Film (TF)

[1Ga03] Examination of Anders' structure zone diagram for conventional magnetron sputtering

*Kohei Kuroshima¹, Ichirou Ikeda¹, Yasuhito Gotoh², Masashi Iguchi¹, Shigeji Sugimoto¹ (1. Osaka Vacuum, Ltd., 2. Department of Electronic Science and Engineering, Kyoto University)

In order to verify the applicability of Anders' structure zone diagram (SZD) to conventional magnetron sputtering, film samples were prepared under certain conditions and the obtained films were observed by Scanning Electron Microscope (SEM). Using the sputtered particle transport simulation, the positions on the Anders' SZD corresponding to the deposition conditions were determined, and the film structure shown at the positions was compared with the SEM observation results. As a result, under conditions corresponding to the film structure of the ZONE T on the Anders' SZD, it was found that the characteristics of the film structure did not show the characteristics of ZONE T so much, but strongly show the characteristics of the adjacent ZONE, especially in the area near the boundaries of the zones.