[1Ia01-07] Vacuum Science Technology (VST)

[1Ia03] Features and welding technology of vacuum structural material 0.2% BeCu alloy

*Masanao Sasaki¹, Masahide Kuroiwa¹, Sam Kishikawa¹, Kazunari Okahashi¹, Takao Nakamura², Keigo Sato³ (1. Tokyo Electronics Co., Ltd., 2. Mie University, 3. Furukawa Electric Co., Ltd.)

As a result of hybrid laser welding, it was confirmed that there was no leakage at E-10Pa・m3/sec (He) or less. However, in order to obtain stable welding accuracy, further optimization of laser-related factors and other technical improvements need to be made. We would like to express our deepest gratitude to Furukawa Electric for their cooperation.