[1P01-52] Poster Presentation

[1P24] Formation and characterization of the structure of the ultrathin Mo films on Al₂O₃(0001) substrate

*Yao-Ming Ku¹, Chin-Chung Yu¹, Che-Ming Liu¹, Ting-Yu Lin¹, Chien Chang¹ (1. Department of Applied Physics, National University of Kaohsiung, Kaohsiung, Taiwan)

By manipulating the thickness and growth temperature, Mo circular disk can be obtained on the Al₂O₃(0001) substrate. The phase transition of Mo films from bcc(110) to fcc(111) was observed in a very narrow growth window. It seems to correlate with a strain release process that is concerned with crystal symmetry between the hcp and bcc lattices, and the thickness of the deposited bcc layer.