[2P22] Observation of zeolite surface by electron energy selection in SEM deceleration method
Nanoporous materials such as zeolites and nanostructured composite materials are becoming more important in the field of catalysis. The understanding of the surface structure characteristics and the precise analysis of the local arrangement of elements in these material systems are indispensable for the deep understanding of the structure performance relationships, which depends on the availability of sophisticated analysis techniques. However, zeolites are usually insulating and electron beam-sensitive materials. Therefore, it is one of the difficult samples to observe fine details of the surface. In order to solve these problems and obtain surface information that governs the properties, the development of a high-resolution low landing voltage SEM is desirable. Herein, we will report the recent development of a high-resolution low landing voltage SEM which is equipped with an advanced detection system to reduce electron charge-up even in zeolites.
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