[A-0-0] VLSI and Artificial Intelligence Problems in the 80s the Computer Industry will Face

Taiyu Kobayashi (1.Fujitsu Limited)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-0-1] Heterostructures for Everything: Device Principles of the 1980's?

Herbert Kroemer (1.Electrical and Computer Engineering, University of California)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-1-1] MOSFET DEVELOPMENT IN IBM - 1963 TO PRESENT

D. L. Critchlow (1.Data Systems Division, International Business Machines Company)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-1-2] BOW AND WARPAGE OF SILICON WAFERS

Shin. Takasu、H. Otsuka、N. Yoshihiro、T. Oku、M. Ishida (1.VLSI Cooperative Laboratories)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-1] Thermal Nitridation of Silicon in Advanced LSI Processing

T. Ito、H. Ishikawa、Y. Fukukawa (1.FUJITSU LABORATORIES LTD.)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-2] Silicon Graphoepitaxy

Michael W. GEIS、Dale C. FLANDERS、Donald J. SILVERSMITH、Dimitri A. ANTONIADIS、Henry I. SMITH (1.Lincoln Laboratory, Massachusetts Institute of Technology)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-3] Oriented Crystal Growth of Si on SiO2 Patterns by Pulse Ruby Laser Annealing

M. Tamura、H. Tamura、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-4] Formation of a Double-Hetero Si/CoSi2/Si Structure Using Molecular Beam and Solid Phase Epitaxies

Shuichi Saitoh、Hiroshi Ishiwara、Seijiro Furukawa (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-5] A New Self-Aligned Framed Mask Method for Selective Oxidation

K. Minegishi、K. Imai、K. Kiuchi、K. Hirata、Y. Yoriume (1.Musashino Electrical Communication Laboratory, NTT)

1980 Conference on Solid State Devices |PDF ダウンロード

[A-2-6] Negative Patterning of AZ1350J by Electron-beam Desensitization of Photo-sensitive Compound

Kozo Mochiji、Yoji Maruyama、Fumio Murai、Shinji Okazaki Yutaka Takeda、Shojiro Asai (1.Central Research Laboratory, Hitachi Ltd.)

1980 Conference on Solid State Devices |PDF ダウンロード