[A-2-5] Scaling of Flash Memory Interpoly Dielectrics Using NH3-Annealed CVD SiO2 Single-Layer Films

T. Kobayashi、A. Katayama、H. Kume、K. Kimura (1.Central Research Laboratory, Hitachi Ltd.)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-6] The Effect of IPA Adsorption on Thin Oxide

Kumi Motai、Toshihiko Itoga、Takashi Irie (1.Central Research Laboratory, Hitachi Ltd.)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-1-1] Electronic Structure and Defects of Lead-Zirconium Titanate (PZT) and Strontium Bismuth Tantalate Ferroelectrics

J Robertson (1.Engineering Department, Cambrige University)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-1-2] Mechanisms of Synchrotron X-Ray Irradiation-Induced Damage in (Ba,Sr)TiO3 Capacitors

Masayoshi Tarutani、Junji Tanimura、Tsuyoshi Horikawa、Muneyoshi Suita、Takaaki Kawahara、Mikio Yamamuka、Hiroaki Sumitani、Kouichi Ono (1.Advanced Technology R&D Center, Mitsubishi Electric Corporation)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-1-3] An Optimized Via Contact Scheme of FeRAM for Double-Level Metallization and Beyond

Yoo-Sang Hwang、Jin-Woo Lee、Sung-Yung Lee、Bon-Jae Koo、Dong-Jin Jung、Yoon-Soo Chun、Mi-Hyang Lee、Dong-Won Shin、Soo-Ho Shin、Sang-Eun Lee、Byung-Hee Kim、Nam-Soo Kang、Ki-Nam Kim (1.Technology Development, Semiconductor R&D Center, Samsung Electronics Co.)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-1-4] A Proposal of Pt/SrBi2Ta2O9/CeO2/Si Structure for Non Destructive Read Out Memory Devices

Dong Suk Shin、Yong Hee Han、Yong Tae Kim (1.Semiconductor Materials Laboratory, Korea Institute of Science and Technology、2.Korea Department of Materials Science, Korea University)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-1-5] The Effect of Capacitor Electrode Contaminant on High Density DRAM's Device Characteristics

Y. Kawai、E. Uchida、M. Itoh、M. Yoshimaru、J. Ida (1.Oki Electric Industry Co., Ltd. VLSI R&D Center)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-1] Properties of Highly Oriented Ta2O5 on Metal Electrodes

Koichi Kishiro、Nobuhiko Inoue、Shih-Chang Chen、Masaki Yoshimaru (1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-2] Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO2 Interlayer

Tomonobu HATA、Yutaka MASUDA、Shin'ichi NAKANO、Kimihiro SASAKI、Yohko HANEDA、Kiyotaka WASA (1.Department of Electrical and Computer Engineering, Kanazawa University、2.RITE)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-3] Fine-Grained SrBi2Ta2O9 Thin Films by Low Temperature Annealing

Nobuhito OGATA、Yasuyuki ITO、Kazuya ISHIHARA、Masaya NAGATA、Hitoshi URASHIMA、Akira OKUTOH、Shinobu YAMAZAKI、Shun MITARAI、Jun KUDO (1.Functional Devices Laboratories, Sharp Corporation)

1997 International Conference on Solid State Devices and Materials |PDF ダウンロード