[P2-14] A Simple Wide-Band MIM Capacitor Model for RF Applications and the Effect of Substrate Grounded Shields

Seong-Sik Song, Seung-Wook Lee, Joonho Gil, Hyungcheol Shin (1.Dept. of EECS, KAIST, 2.School of EE, Seoul National University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P2-15] Improvement on Turn-on Speed of Substrate-Triggered SCR Device by Using Dummy-Gate Structure for On-Chip ESD Protection

Kuo-Chun Hsu, Ming-Dou Ker (1.Nanoelectronics and Gigascale Systems Laboratory, Institute of Electronics, National Chiao-Tung University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P2-16] A new Conductivity Modulated LDMOSFET employing Buried P Region and P+ Drain

Jae-Keun Oh, Byung-Chul Jeon, Min-Koo Han, Yearn-Ik Choi (1.School of Electrical Eng. ENG420-050, Seoul National University, 2.College of Electronics Eng., Ajou University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P2-17] Trench IGBT for the Improved Short Circuit Capability by Employing the Curved Junction and Wide Cell Pitch

Soo-Seong Kim, Min-Woo Ha, Yearn-Ik Choi, Min-Koo Han (1.School of Electrical Eng. & Computer Science #50, Seoul National University, 2.College of Electronics Eng., Ajou University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P2-18L] Monolithic Transformer Modeling Based on the 4-port Characterization Technique

Sheng-Chun Wang, Guo-Wei Huang, Shi-Dao Wu, An-Sam Peng, Ming-Hsiang Cho (1.National Nano Device Laboratories)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P2-19L] Improved Modeling Technique for On-Chip Silicon Spiral Inductors

Ming-Hsiang Cho, Guo-Wei Huang, Kun-Ming Chen, Sheng-Yu Wen, Sheng-Chun Wang (1.National Nano Device Laboratories)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P3-1] Novel Storage-Node Contacts with Stacked PCM-Sp-TiN Barrier for MIM-Ru/Ta2O5/Ru Capacitors in Giga-Bit DRAMs

Tsuyoshi Kawagoe, Yoshitaka Nakamura, Keiji Kuroki, Isamu Asano, Hidekazu Goto, Naruhiko Nakanishi (1.Elpida Memory, Inc.)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P3-2] Very High Reliability of Ultrathin Silicon Nitride Gate Dielectric Film for sub-100nm Generation

Masanori Komura, Masaaki Higuchi, Weitao Cheng, Ichiro Ohshima, Akinobu Teramoto, Masaki Hirayama, Shigetoshi Sugawa, Tadahiro Ohmi (1.Graduate School of Engineering, Tohoku University, 2.The New Industry Creation Hatchery Center (NICHe), Tohoku University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P3-3] Excellent Contact-Hole Etching with NH3 Added C5F8 Pulse-Modulated Plasma

Masahiro Ooka, Shin Yokoyama (1.Research Center for Nanodevices and Systems, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P3-4] Electroless Copper Seed Activated by 1nm ICB-Pd Catalytic Layer for Fine Cu Interconnections

Zenglin Wang, Osamu Yaegashi, Hiroyuki Sakaue, Takayuki Takahagi, Shoso Shingubara (1.Graduate School of Advanced Science of Matter, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF Download

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