The Japan Society of Applied Physics

[B-1-03] A Sidewall Electrode TiOx/TiOxNy ReRAM with Excellent Memory Window Control and Reliability Using Plasma Oxidation and a Novel Degradation-detecting Writing Algorithm

D. Lee1, J. Wu1, M. Lee1, E. Lai1, W. Khwa1, Y. Lin1, W. Chen1, K. Chiang1, T. Wang1, S. Horng2, J. Gong2, H. Lung1, K. Hsieh1, C. Lu1 (1.Macronix International Co., Ltd.(Taiwan), 2.National Tsing Hua Univ.(Taiwan))

2016 International Conference on Solid State Devices and Materials |2016年9月27日(火) 14:20 〜 14:40 |PDF ダウンロード