Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:30 PM - 1:45 PM

△ [18p-Z17-1] Electron temperature and density diagnostics of the atmospheric pressure argon plasma jet for surface cleaning based on optical emission spectroscopic measurement

〇Yuya Yamashita¹, Takuya Akiba¹, Toshihide Iwanaga¹, Hidehiko Yamaoka¹, Shuichi Date¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)

1:45 PM - 2:00 PM

[18p-Z17-2] A Study of Excitation Spectrum of Two-step Excitation Laser Induced Fluorescence Method for Atomic Hydrogen

〇Shusuke Nishiyama¹, Yuuto Hishida², Koichi Sasaki² (1.Japan Health Care College, 2.Hokkaido Univ.)

2:00 PM - 2:15 PM

[18p-Z17-3] Measurement of vibrational temperature in atmospheric-pressure dielectric barrier discharge nitrogen plasma jet by vibrational Raman scattering

〇(M1)Atsufumi Miyake¹, Naoki Shirai¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

2:15 PM - 2:30 PM

[18p-Z17-4] Velocity-field measurements of EUV source plasmas using Thomson scattering

〇Kentarou Tomita¹, Yiming Pan², Kiichiro Uchino² (1.Hokkaido Univ., 2.Kyushu Univ.)

2:30 PM - 2:45 PM

△ [18p-Z17-5] Measurement of negative ion density in streamer discharge in air by cavity ringdown absorption spectroscopy

〇(B)Kimika Fushimi¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

2:45 PM - 3:00 PM

[18p-Z17-6] Spectroscopic diagnostics of self-absorbing light source with micro-discharge hollow cathode plasma for vacuum ultraviolet absorption spectroscopy

〇Keigo Takeda¹, Takayoshi Tsutsumi², Mineo Hiramatsu¹, Masaru Hori² (1.Meijo Univ., 2.Nagoya Univ.)

3:00 PM - 3:15 PM

△ [18p-Z17-7] In-situ measurement of Deposited Film Thickness and Electron density with Double Curling Probes

〇(B)Shota Kato¹, Daisuke Ogawa¹, Keiji Nakamura¹ (1.Chubu Univ.)

3:30 PM - 3:45 PM

[18p-Z17-8] Wireless communication of in-situ measurement data by color sensor in plasma reactor

〇Keiji Sakurai¹, Takayuki Kitagawa², Shigeyuki Miyagi¹, Kazuyuki Noborio², Koushi Taguchi², Osamu Sakai¹ (1.Univ. Shiga Pref., 2.Sakigake Semicon.)

3:45 PM - 4:00 PM

[18p-Z17-9] Effect of Oxygen Admixture on Excited-State Number Densities of Low-Pressure Argon Plasma Based on Collisional Radiative Model

〇(M2)Yusuke Tsuchiya¹, Atushi Nezu^2,3, Hiroshi Akatsuka^3,1 (1.Sch.Eng.,Tokyo Tech, 2.Open Facility Center,Tokyo Tech, 3.IIR,Tokyo Tech)

4:00 PM - 4:15 PM

[18p-Z17-10] Measurement of Influence of Input Power on Fundamental Properties of Tetramethylsilane Plasmas for Deposition of Si-containing DLC Films

〇Yoshiaki Watanabe¹, Shun Suzuki², Koichi Ishii², Akinori Oda², Takayuki Ohta³, Hiroyuki Kousaka⁴ (1.Innovation Science, 2.Chiba Inst. Technol., 3.Meijo Univ., 4.Gifu Univ.)

4:15 PM - 4:30 PM

[18p-Z17-11] Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O₂ Plasma

〇(M1)Tomohiro Ogasawara¹, Yuki Iwata¹, Haruka Suzuki¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.NIFS)

4:30 PM - 4:45 PM

[18p-Z17-12] Generation of Planer Thermal Plasma Jet by Diode Rectified AC Arc

〇Manabu Tanaka¹, Yuta Kugimiya¹, Takuya Suenaga¹, Takayuki Watanabe¹, Tsugio Matsuura² (1.Kyushu Univ., 2.Taso Arc Co.)

4:45 PM - 5:00 PM

[18p-Z17-13] Micro-Thermal Plasma Jet generated by Outer Orifice Structure

〇Hibiki Kato¹ (1.Hiroshima Univ.)

5:00 PM - 5:15 PM

[18p-Z17-14] Ion composition analysis of Deep Oscillation Magnetron Sputtering (DOMS) using a reflectron time-of-flight mass spectrometer

〇Yuki Nakagomi¹, Hiroshi Nishida¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Naoyuki Hirata², Masahide Tona², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytechinic Univ., 2.Ayabo Corp, 3.Toyota Phys. & Chem. Res. Inst., 4.Tohoku Univ.)

5:30 PM - 5:45 PM

[18p-Z17-15] Detection of vibrational excited states of N₂ in a miniature electron cyclotron resonance plasma source by threshold ionization mass spectrometry

〇Shinnosuke Hosoyama¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

5:45 PM - 6:00 PM

[18p-Z17-16] Measurements of Plasma Parameters for Estimating Accessibility Conditions of Microwaves and Optimizing Microwave Launching on ECRIS

〇Wataru Kubo¹, Masahiro Anan², Shuhei Harisaki¹, Issei Owada¹, Koichi Sato¹, Kazuki Tsuda¹, Yushi Kato¹ (1.Osaka Univ., 2.Osaka univ.)

6:00 PM - 6:15 PM

[18p-Z17-17] Gas Mixing and Pulse Microwaves Effects and Impurities Characteristic on Electron Cyclotron Resonance Multicharged Ion Source

〇Kazuki Tsuda¹, Shuhei Harisaki¹, Wataru Kubo¹, Issei Owada¹, Koichi Sato¹, Yushi Kato¹ (1.Osaka Univ.)

6:15 PM - 6:30 PM

[18p-Z17-18] Producing Highly Efficient Multicharged Ion Beams by ICR/LHR Heating on ECRIS

〇Shuhei Harisaki¹, Wataru Kubo¹, Kazuki Tsuda¹, Issei Owada¹, Koichi Sato¹, Yushi Kato¹ (1.Osaka Univ.)

6:30 PM - 6:45 PM

[18p-Z17-19] Deceleration Characteristics and X-Y Beam Profiles and Ion Beam Operating Conditions of ECRIS

〇Koichi Sato¹, Shuhei Harisaki¹, Wataru Kubo¹, Issei Owada¹, Kazuki Tsuda¹, Yushi Kato¹ (1.Osaka Univ.)

6:45 PM - 7:00 PM

[18p-Z17-20] Optimization of Fullerene Ion Beam Generation for Iron Endhedral Fullerene Synthesis on ECRIS

〇Issei Owada¹, Wataru Kubo¹, Shuhei Harisaki¹, Koichi Sato¹, Kazuki Tsuda¹, Atsushi Kitagawa², Masayuki Muramatsu², Yoshikazu Yoshida³, Yushi Kato¹ (1.Osaka Univ., 2.NIRS, 3.Toyo Univ.)

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