Characterization of Ion Implantation-induced Structural Damage and Recovery in β-Ga<sub>2</sub>O<sub>3</sub> Using Aberration-corrected STEM

Timothy Jinsoo Yoo

Presentation information

We-1: Oxide

Oxide

We-1: Oxide

Wed. Aug 31, 2022 3:00 PM - 4:15 PM DRIP ONLINE CONFERENCE

Chair:Michal Bockowski, Nadeemullah A Mahadik

4:00 PM - 4:15 PM

△ [We1-4] Characterization of Ion Implantation-induced Structural Damage and Recovery in β-Ga₂O₃ Using Aberration-corrected STEM

*Timothy Jinsoo Yoo¹, Xinyi Xia², Alan Jacobs³, Marko Tadjer³, Fan Ren², Stephen Pearton¹, Honggyu Kim¹ (1. Department of Materials Science and Engineering, University of Florida, 2. Department of Chemical Engineering, University of Florida, 3. Naval Research Laboratory)