19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

Presentation information

Th-1: SiC-1

SiC

Th-1: SiC-1

Thu. Sep 1, 2022 3:00 PM - 4:15 PM DRIP ONLINE CONFERENCE

Chair:Hidekazu Tsuchida, Junji Senzaki

3:00 PM - 3:30 PM

[Th1-1/Inv] Investigation of Defects in Thick 4H-SiC Epitaxial Layers for 10+kV Devices

*Nadeemullah A Mahadik1, Robert E Stahlbush1 (1. Naval Research Laboratory)