19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

Presentation information

Th-1: SiC-1

SiC

Th-1: SiC-1

Thu. Sep 1, 2022 3:00 PM - 4:15 PM DRIP ONLINE CONFERENCE

Chair:Hidekazu Tsuchida, Junji Senzaki

3:30 PM - 3:45 PM

[Th1-2] Contribution of 90° Si-Core Partial Dislocation to Asymmetric Double-Rhombic Single Shockley Stacking Faults in 4H-SiC Epitaxial Layers

*Johji Nishio1, Chiharu Ota1, Ryosuke Iijima1 (1. Corporate R&D Center, Toshiba Corp.)