Th-2: SiC-2

[Th2-4] Cathodoluminescence study of 3C-SiC layer grown on 4H-SiC substrate

*Jun Chen¹, Hiroyuki Sazawa², Wei Yi³, Takashi Sekiguchi⁴ (1. National Institute for Materials Science, 2. National Institute of Advanced Industrial Science and Technology, 3. Kyoto University, 4. University of Tsukuba)