Regular sessions(Oral presentation)
[27p-A3-1~17] 8.4 Plasma etching
Wed. Mar 27, 2013 1:30 PM - 6:00 PM A3 (K1 2F-201)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
○Naoyuki Kofuji1, Nobuyuki Negishi1, Hiroaki Ishimura2, Toshiaki Nishida2, Hitoshi Kobayashi2 (Hitachi CRL1, Hitachi High-Tech2)
○Yasuhiro Nojiri1, daiki Iino1, Rikyu Ikariyama1, Masato Sawada1, Keiji Suzuki1, Takeshi Yamauchi1 (Corporate Manufacturing Engineering Center, Toshiba Corp.1)
○Daiki Iino1, Yasuhiro Nojiri1, Keiji Suzuki1, Takumi Oike2, Yoshitaka Fujii2, Hirotaka Toyoda2,3 (Corporate Manufacturing Engineering Center, Toshiba1, Nagoya Univ.2, PLANT, Nagoya Univ.3)
○Tomohiro Kubota1, Michio Sato2, Takuya Iwasaki3, Kohei Ono3, Seiji Samukawa1,4 (IFS, Tohoku Univ.1, Harada Corp.2, Mizuho R&I, Inst.3, WPI-AIMR, Tohoku Univ.4)
○Toshio Hayashi1, Satomi Tajima1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (Nagoya University1)
○(B)Kotaro Mura1, Takefumi Kamioka1,2, Fumiya Isono1,2, Yuji Kawamura1,2, Yasuhiro Shikahama1,2, Hiroki Yamashita1,2, Kohei Yamada1, Hiroki Kosugiyama1, Shuichiro Hashimoto1, Takanobu Watanabe1,2 (Waseda Univ.1, JST-CREST2)
○Suzuki Toshiya1, Takeda Keigo1,2, Kondo Hiroki1, Ishikawa Kenji1, Sekine Makoto1,2, Hori Masaru1,2 (Nagoya University1, JST-CREST2)
○(M1)Jiadong Cao1, Ryosuke Kometani1, Yi Lu1, Jongyun Park1, Keigo Takeda1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1)
○Nobuya Nakazaki1, Hirotaka Tsuda1, Yoshinori Takao1, Koji Eriguchi1, Kouichi Ono1 (Kyoto Univ.1)
○(M1)Keita Miyake1, Michiro Isobe1, Masanaga Fukasawa2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (Osaka Univ.1, Sony corporation2)
○Yu Muraki1, Hu Li1, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (Graduate School of Engineering, Osaka Univ.1)
○Hu Li1, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (Graduate School of Engineering, Osaka Univ.1)
○(D)Kohei Mizotani1, Michiro Isobe1, Satoshi Hamaguchi1 (Osaka Univ.1)
○Daiki Nakayama1, Akira Wada1, Tomohiro Kubota1, Seiji Samukawa1,2 (IFS, Tohoku Univ.1, WPI-AIMR, Tohoku Univ.2)
○Yusuke Kondo1, Yudai Miyawaki1, Keigo Takeda1, Hiroki Kondo1, Kenji Ishikawa1, Toshio Hayashi1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1)
Kenji Ishikawa1, Hideo Horibe2, Keigo Takeda1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1, ○Haoran Wang1 (Nagoya Univ1, Kanazawa Inst. Technol2)
Takuya Takeuchi1, ○Kenji Ishikawa1, Yuchi Setsuhara2, Keigo Takeda1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (Nagoya Univ.1, Osaka Univ.2)