1:45 PM - 2:00 PM
△ [17p-E206-1] Research on temperature dependence of substrate warpage of Cu thin film deposited on Si
〇Yuji Sato1, Jun Fujita1, Yusaku Ito1, Hiroshi Kobayashi1 (1.Mitsubishi Electric)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Mar 17, 2017 1:45 PM - 3:30 PM E206 (E206)
Masato Sone(Titech)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
1:45 PM - 2:00 PM
〇Yuji Sato1, Jun Fujita1, Yusaku Ito1, Hiroshi Kobayashi1 (1.Mitsubishi Electric)
2:00 PM - 2:15 PM
〇ryo yokogawa1, Takahiro Suzuki1, Shuichiro Hashimoto2, Shuhei Asada2, Motohiro Tomita2,3, Takanobu Watanabe2, Atsushi Ogura1 (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow)
2:15 PM - 2:30 PM
〇(M2)Hiroki Yoshikawa1, Shijo Nagao2, Takahiko Sakaue3, Yoichi Kamikoriyama3, Takahumi Sasaki4, Noriko Kagami2, Tohru Sugahara2, Jinting Jiu2, Katsuaki Suganuma2 (1.Osaka Univ., 2.Osaka Univ. ISIR, 3.Mitsui Mining & Smelting, 4.Hikoshima Smelting)
2:30 PM - 2:45 PM
〇(M2)Hiroki Yoshikawa1, Shijo Nagao2, Takahiko Sakaue3, Yoichi Kamikoriyama3, Takahumi Sasaki4, Akio Shimoyama2, Tohru Sugahara2, Jinting Jiu2, Katsuaki Suganuma2 (1.Osaka Univ., 2.Osaka Univ. ISIR, 3.Mitsui Mining & Smelting, 4.Hikoshima Smelting)
2:45 PM - 3:00 PM
〇Katsuya Furuna1, Jianbo Liang1, Moeko Matsubara2, Marwan Dhamrin2, Yoshitaka Nishio2, Naoteru Shigekawa1 (1.Osaka City Univ., 2.Toyo Aluminium K.K.)
3:00 PM - 3:15 PM
〇Ryutaro Suda1, Mamiko Yagi1, Akira Kojima1, Jun-ichi Shirakashi1, Nobuyoshi Koshida1 (1.Tokyo Univ. of Agri. & Technol.)
3:15 PM - 3:30 PM
〇Yusuke Omata1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)
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