[18a-C309-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-C309-2] Development of bio-template arrangement equipment for realizing mask-less defect-free fabrication

〇MIKIO KADOI¹, MASAHISA ISHIDA², MAMI TANAKA², MASAHIRO SOTA², DAISUKE OHORI³, SHUICHI NODA⁴, YOSHIYUKI NOZAWA⁵, BRIAN RIAO⁵, RYOSUKE FUJII⁵, TOSHIYASU HAYAMI⁵, KAZUHIKO ENDO⁴, SEIJI SAMUKAWA³ (1.LTJ Corp., 2.NAGASE & CO., LTD., 3.IFS, Tohoku Univ., 4.AIST, 5.SPT Co., Ltd.)

Keywords:nano-sized quantum dots, ferritin, maskless etching

When processing of nano-sized quantum dots is realized, it becomes possible to manufacture solar cells, thermoelectric conversion elements, etc. at low cost, which greatly contributes to the realization of elements for IoT applications having a highly efficient power generation function as an environmental power source. In this research and development, we have developed a bio-template formation device that utilizes the self-orientation of a ferritin protein that includes a nano-sized iron core that can be a maskless etching mask that can form a nanostructure without using expensive photolithography.