The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[18p-B11-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Sep 18, 2019 1:15 PM - 5:00 PM B11 (B11)

Masaharu Kobayashi(Univ. of Tokyo), Shinji Migita(AIST), Hitoshi Wakabayashi(Tokyo Tech)

3:45 PM - 4:00 PM

△ [18p-B11-10] Fabrication of Y2O3/Ge pMOSFETs through clean Ge surface

〇(M1)Hiroto Ishii1,2, Hiroyuki Ishii2, Wen Hsin Chang2, Yukinori Morita2, Akira Endoh1, Hiroki Fujisjiro1, Tatsuro Maeda1,2 (1.TUS, 2.AIST)

Keywords:germanium, interface