〇Takeaki Yajima^1,2, Tomonori Nishimura¹, Takahisa Tanaka¹, Ken Uchida¹, Akira Toriumi¹ (1.Univ. of Tokyo, 2.JST PRESTO)

〇(M1C)Soshun Doko¹, Yoshiaki Ishii¹, Masahiro Moniwa¹ (1.Tokyo Univ. of Tecnology)

〇Kazuya Fukase¹, Minoru Oda¹, Toshitaka Miyata¹, Hiroki Okamoto¹, Akira Hokazono¹, Isamu Ito¹, Masato Koyama¹ (1.Toshiba Memory)

〇Tomohiko Yamagishi¹, Atsushi Hori¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech.)

〇Tomoko Mizutani¹, Kiyoshi Takeuchi¹, Takuya Saraya¹, Masaharu Kobayashi^1,2, Toshiro Hiramoto¹ (1.IIS, Univ. of Tokyo, 2.VDEC, Univ. of Tokyo)

〇KIYOSHI TAKEUCHI¹, MASAHARU KOBAYASHI¹, TOSHIRO HIRAMOTO¹ (1.IIS, Univ. Tokyo)

〇Yusaku Shiotsu¹, Shuu'ichirou Yamamoto¹, Hiroshi Funakubo², Minoru Kuribayashi Kurosawa³, Satoshi Sugahara¹ (1.FIRST, Tokyo Inst of Tech, 2.Sch. of Mater. and Chem. Tech., Tokyo Inst of Tech, 3.Sch. of Eng., Tokyo Inst of Tech)

〇Hayato Yoshida¹, Daiki Kitagata¹, Shuu'ichirou Yamamoto¹, Satoshi Sugahara¹ (1.FIRST,Tokyo Inst. of Tech.)

〇Kenichiro Takiguchi¹, Daiki Kitagata¹, Tsubasa Matsuzaki¹, Syuu'ichirou Yamamoto¹, Satoshi Sugahara¹ (1.FIRST, Tokyo Inst. of Tech.)

〇Takumi Hara¹, Hayato Yoshida¹, Daiki Kitagata¹, Shuu'ichirou Yamamoto¹, Satoshi Sugahara¹ (1.Tokyo Tech)

〇Daiki Kitagata¹, Shuu'ichirou Yamamoto¹, Satoshi Sugahara¹ (1.FIRST, Tokyo Inst. of Tech.)

〇Chengji Jin¹, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi¹ (1.The Univ. of Tokyo)

〇(D)FEI MO¹, Yusaku Tagawa², Chengji Jin¹, MinJu Ahn¹, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi¹ (1.IIS, the Univ. of Tokyo, 2.The Univ. of Tokyo)

〇Keita Daimatsu¹, Jiro Ida¹, Takuya Yamada¹, Takayuki Mori¹ (1.Kanazawa Inst.)

〇Takayuki Mori¹, Jiro Ida¹, Hiroki Endo¹ (1.Kanazawa Inst. of Tech.)

〇(D)Minju Ahn¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.Institute of Industrial Science, University of Tokyo)

〇Kimihiko Kato^1,2, Kwangwon Jo², Hiroaki Matsui², Hitoshi Tabata², Takahiro Mori¹, Yukinori Morita¹, Takashi Matsukawa¹, Mitsuru Takenaka², Shinichi Takagi² (1.AIST, 2.Univ. of Tokyo)

〇Kei Sumita¹, Jun Takeyasu¹, Kimihiko Kato¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.The Univ. of Tokyo)

〇Tatsuro Maeda¹, Hiroyuki Ishii¹, Wen Hsin Chang¹, Toshifumi Irisawa¹, Yuichi Kurashima¹, Hideki Takagi¹, Noriyuki Uchida¹ (1.AIST)

〇CheolMin Lim¹, Ziqiang Zhao¹, Kei Sumita¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)

〇(M1)Hiroto Ishii^1,2, Hiroyuki Ishii², Wen Hsin Chang², Yukinori Morita², Akira Endoh¹, Hiroki Fujisjiro¹, Tatsuro Maeda^1,2 (1.TUS, 2.AIST)

〇Shota Komago¹, Ryo Yokogawa^1,2, Kazutoshi Yoshioka¹, Naomi Sawamoto¹, John Borland³, Takashi Kuroi⁴, Yoji Kawasaki⁵, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.J.O.B. Technologies, 4.Nissin Ion Equipment, 5.SMIT)

〇Daisuke Ohori¹, Takuya Fujii¹, Shuichi Noda², Wataru Mizubayashi², Kazuhiko Endo^1,2, Yiming Li⁴, Yao-Jen Lee⁵, Takuya Ozaki¹, Seiji Samukawa^1,2,3 (1.IFS, Tohoku Univ., 2.AIST, 3.AIMR, Tohoku Univ., 4.NCTU, 5.NDL)

〇Haruo Iwatsu¹ (1.Kumamoto Univ.)

〇Kensuke Horiuchi¹, Tastuya Joutsuka¹, Satoshi Yamauchi¹ (1.Ibaraki Univ.)

〇Yuma Okazaki¹, Shuji Nakamura¹, Koji Onomitsu², Nobu-Hisa Kaneko¹ (1.AIST, 2.NTT-BRL)

〇Raisei Mizokuchi¹, Sinan Bugu¹, Masahiro Tadokoro¹, Tetsuo Kodera¹ (1.Tokyo Tech.)

〇(M1)Ryutaro Matsuoka¹, Shunsuke Ota¹, Masahiro Tadokoro¹, Soichiro Hiraoka¹, Raisei Mizokuchi¹, Tetsuo Kodera¹ (1.Tokyo Tech.)

〇Gento Yamahata¹, Sungguen Ryu², Nathan Johnson¹, H. -S. Sim², Akira Fujiwara¹, Masaya Kataoka³ (1.NTT BRL, 2.KAIST, 3.NPL)

〇Shota Iizuka¹, Hidehiro Asai¹, Junichi Hattori¹, Koichi Fukuda¹, Takahiro Mori¹ (1.AIST)

〇Manjakavahoaka Razanoelina¹, Himma Firdaus¹, Tokinobu Watanabe¹, Masahiro Hori¹, Daniel Moraru¹, Yasuo Takahashi², Akira Fujiwara³, Yukinori Ono¹ (1.Shizuoka Univ., 2.Hokkaido Univ., 3.NTT Basic Research Lab.)

〇Masahiro Hori¹, Toshiaki Tsuchiya¹, Yukinori Ono¹ (1.Shizuoka Univ.)

〇Toshiaki Tsuchiya¹, Masahiro Hori¹, Yukinori Ono¹ (1.Shizuoka Univ.)

〇Toshiaki Tsuchiya¹, Masahiro Hori¹, Yukinori Ono¹ (1.Shizuoka Univ.)

〇(DC)KwangWon Jo¹, Takagi Shinichi¹, Mitsuru Takenaka¹ (1.The Univ. of Tokyo)

〇Masahiro Morimoto¹, Rintaro Hatanaka¹, Tomohiro Shimizu¹, Takeshi Ito¹, Shoso Shingubara¹ (1.Kansai Univ.)

〇Atsuhiro Yamagishi¹, Reiji Tanabe¹, Osamu Sugiura¹ (1.Chiba inst. of Tech.)

〇Hideaki Machida¹, Sudoh Hiroshi¹, Ishikawa Masato¹, Ohshita Yoshio² (1.Gas-Phase Growth, 2.Toyota Inst. Tech.)

〇Tatsuya Meguro¹, Fumiaki Hasebe¹, Akinori Takeyama², Takeshi Ohshima², Yasunori Tanaka³, Shin-Ichiro Kuroki¹ (1.RNBS, 2.QST, 3.AIST)

〇Syunpei Kajita¹, Koichi Fukunaga¹, Hideo Horibe² (1.Sakamoto Co.,Ltd., 2.Osaka-City Univ.)

〇(M2)Hejie Yan¹, Jui-Hung Hung², Kazuo Sato², Hirohito Yamada^1,2, Hiroyuki Yokoyama^1,2 (1.Tohoku univ., 2.NICHe, Tohoku univ.)