9:00 AM - 9:15 AM
〇Hiroyuki Tanaka1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sat. Mar 9, 2019 9:00 AM - 12:00 PM M114 (H114)
Hitoshi Habuka(Yokohama National University), Masato Sone(Tokyo Tech)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Hiroyuki Tanaka1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
9:15 AM - 9:30 AM
〇kazushige sato1,3, Takashi Chiba1,3, Masao Terada1,3, Shinichi Ikeda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)
9:30 AM - 9:45 AM
〇Shuichi Noda1, Kazuhiro Koga2, Kazumasa Nemoto1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
9:45 AM - 10:00 AM
〇Noriko Miura1, Kazuhiro Koga1, Hiroyuki Tanaka1,2, Yoshiyuki Nozawa3, Toshihiro Hayami3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.SPPT)
10:00 AM - 10:15 AM
〇Masashi Kase1, Kazushige Sato2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SAKAGUCHI VOC CORP.)
10:15 AM - 10:30 AM
〇Fumito Imura1,2, Michihiro Inoue1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
10:30 AM - 10:45 AM
〇Yongxun Liu1, Kazushige Sato2, Hiroyuki Tanaka1,2, Kazuhiro Koga2, Sommawan Khumpuang1,2, Masayoshi Nagao1, Takashi Matsukawa1, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
10:45 AM - 11:00 AM
〇Kazuhiro Koga1, Liu Y.X2, Fumito Imura2,1, Masashi Kase2, Shuichi Noda2, Kazumasa Nemoto2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
11:00 AM - 11:15 AM
〇Kazumasa Nemoto1, Hiroyuki Tanaka1, Shuichi Noda1, Noriko Miura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
11:15 AM - 11:30 AM
Toshinori Takahashi1, Mitsuko Muroi1, 〇Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)
11:30 AM - 11:45 AM
〇Tomoaki Kageyama1,3, Kazumasa Nemoto2, Sommawan Khumpuang2,3, Shiro Hara2,3, Sang-Seok Lee1 (1.Tottori Univ., 2.MINIMAL, 3.AIST)
11:45 AM - 12:00 PM
〇Takashi Yajima1,2, Noriko Miura1, Masaharu Yasui1,2, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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