[B-5-9] Threshold Voltage Homogeneity and Electrical Properties of GaAs MESFETs on In-Doped Dislocation-Free Substrate

Y. Tanaka、T. Matsumura、F. Shimura、M. Kanamori、A. Higashisaka (1.2nd LSI Div., NEC Corp.、2.Microelectronics Res. Labs., NEC Corp.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[B-5-10] New Self-Aligned Gate Material; LaB6 for GaAs-IC

Tatsuo Yokotsuka、Yoko Uchida、Keisuke L. I. Kobayashi、Tadashi Narusawa、Hisao Nakashima (1.Optoelectronics Joint Research Laboratory)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-9LN] Preparation of high photosensitive a-SiGe:H alloys from glow-discharge plasma

Akihisa Matsuda、Masato Koyama、Yuichiro Imanishi、Motoo Toyama、Nozomu Ikuchi、Kazunobu Tanaka (1.Electrotechnical Laboratory)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-10LN] Amorphous-Si:H solar cells having a conversion efficiency of 10.5% by the separate chamber photo-CVD system

W. Y. Kim、H. Tasaki、H. Takei、M. Konagai、K. Takahashi (1.Department of Physical Electronics, Tokyo Institute of Technology、2.K.K. Denkaihaku Kogyo)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-7LN] Epitaxial Growth of AlxGa1-xN by MOVPE

Y. Koide、H. Itoh、N. Sawaki、I. Akasaki M. Hashimoto (1.Department of Electronics, School of Engineering, Nagoya University、2.Toyota Central R&D Laboratories Inc.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-6LN] Lateral Solid Phase Epitaxy of Amorphous Si Films onto Non-planar SiO2 Patterns

Hiroshi Ishiwara、Akihiro Tamba、Seijiro Furukawa (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-7LN] Minimization of Residual Stress in SOI Films

Atsushi Ogura、Koji Egami、Masakazu Kimura (1.Fundamental Research Laboratories, NEC Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-8LN] XeCl Excimer Laser Annealing used in the Fabrication of Poly-Si TFTs

T. Sameshima、M. Sekiya、S. Usui (1.Sony Corporation Research Center)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-9LN] XMOS Transistor for a 3D-IC

T. SEKIGAWA、Y. HAYASHI、K. ISHII、S. FUJITA (1.Electrotechnical Labolatory)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-10LN] Synchrotron Radiation Excited Chemical Vapor Deposition of a-Si:H and SixNyHz Film

Hakaru KYURAGI、Tsuneo URISU (1.NTT Atsugi Electrical Communication Laboratories)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード