[A-3-2] Laser MOCVD Crystal Growth in GaAs

Yoshinobu Aoyagi、Sohachi Iwai、Yusaburo Segawa、Atsutoshi Doi、Susumu Namba (1.The Institute of Physical and Chemical Research、2.International Micro Technology Corp.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-3] Laser-Assisted Chemical Vapor Deposition of Stoichiometric Boron Nitride

Shin Yokoyama、Yasuhiro Yamakage、Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-4] Influence of Small Amounts of Oxygen on Xenon Resonance Lamp Photo-CVD

Hidekazu OKUHIRA、Akira SHINTANI (1.Central Research Laboratory, Hitatchi, Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-5] ArF Laser Enhanced Etching of Silicon

T. Fujii、R. Kawabata、H. Komiya、H. Shimizu (1.VLSI Research Laboratories, SHARP Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-6] ArF Excimer Laser-Enhanced Oxidation of Silicon in O2/NF3 Gas Mixture

Mizuho Morita、Seiichi Aritome、Masataka Hirose (1.Department of Electrical Engineering, Hiroshima University)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-7] SiO2 Photo-CVD Using Reactive Oxygen by Double Light Excitation

Masanori OKUYAMA、Kohji INOUE、Masanori MICHIMORI、Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-8] Laser Initiated Chemical Vapor Deposition of Tungsten Films on Silicon Dioxide

A. Shintani、S. Tsuzuku、E. Nishitani、M. Nakatani (1.Central Res. Lab. Hitachi, Ltd.、2.Production Engineering Res. Lab. Hitachi, Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-9] Direct Writing of Highly Conductive MO Lines by Laser Induced CVD

Fumihiko Uesugi、Hiroyuki Yokoyama、Shunji Kishida (1.Opto-Electronics Research Laboratories, NEC Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-1] Super-Doped Structure

Masaki Ogawa、Toshio Baba、Takashi Mizutani (1.Fundamental Research Laboratories, NEC Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-2] Low-Pressure OMVPE of GaAs Using a Triethylgallium Source

K. Kimura、S. Takagishi、S. Horiguchi、K. Kamon、M. Mihara、M. Ishii (1.Optoelectronics Joint Research Laboratory)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード