[S-A-3] Analysis of a μc-Si Hetero-emitter Transistor by Changing Operation Temperature

Kimihiro SASAKI, Seijiro FURUKAWA (1.Graduate School of Science and Engineering Tokyo Institute of Technology)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-A-4] Thermal Stability of SiCx:H-Emitter Silicon HBTs

Mamoru Kuwagaki, Katsumi Murase, Kazuo Imai, Yoshihito Amemiya (1.NTT LSI Laboratories)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-A-5] Poly-Si/GaAs Layered Structure on Si as a Wide Bandgap Emitter for Si Heterojunction Bipolar Transistor

K. Kikuta, T. Kikkawa, M. Kawanaka, J. Sone (1.NEC Corp. Microelectronics Research Laboratories)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-A-6] High Hole Mobility in Modulation-Doped p-Si0.5Ge0.5/Ge/Si1-x5Gex5 Hetrostructures fabricated Using Molecular Beam Epitaxy

Eiichi Murakami, Hiroyuki Etoh, Kiyokazu Nakagawa, Masanobu Miyao (1.Central Research Laboratory, Hitachi, Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-A-7] Low-Temperature Boron-Doped Si1-xGex Heteroepitaxy by LPCVD

Takeshi KARASAWA, Kiyohisa FUJINAGA, Izumi KAWASHIMA (1.NTT LSI Laboratories)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-1] Optical Absorption in Ultrathin Silicon Oxide Film

N. Miyata, K. Moriki, M. Fujisawa, M. Hirayama, T. Matsukawa, Takeo Hattori (1.Musashi Institute of Technology, 2.The Institute for Solid State Physics, The University of Tokyo, 3.LSI Research and Development Laboratory, Mitsubishi Electric Corporation)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-2] Investigation of Si(100) Oxidation Process by XANES Spectroscopy Using Synchrotron Radiation

Hideo SEKIYAMA, Masatoshi NAKAZAWA, Susumu KAWASE (1.Central Research Laboratory, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-3] In-Depth Profiling of Suboxide Compositions in the SiO2/Si Interface by Angle Resolved X-ray Photoelectron Spectroscopy

Masaru TAKAKURA, Takeshi SUNADA, Seiichi MIYAZAKI, Masataka HIROSE (1.Department of Electrical Engineering, Hiroshima University)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-4] Native Oxides Formed During Wet Chemical Treatments

K. Takase, T. Igarashi, N. Miyata, K. Moriki, R. Sugino, Y. Nara, T. Ito, M. Fujisawa, T. Hattori (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology, 2.Fujitsu Laboratories Ltd., Atsugi, 3.The Institute of Solid State Physics, The University of Tokyo)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-5] In-situ Monitoring of Surface Process by Photo-emitted Electron in Photo-processing Systems

H. Itoh, M. Iwasaki, K. Tsukamoto, Y. Akasaka (1.LSI R&D Lab., Mitsubishi Electric Corp.)

1989 Conference on Solid State Devices and Materials |PDF Download