[PB7-6] Behavior of Wafer SMD (Surface Micro Defect) as a Origin of Oxide Breakdown

Moriya MIYASHITA、Hiroyuki FUKUI、Atsuko KUBOTA、Shuichi SAMATA、Hachiro HIRATSUKA、Yoshiaki MATSUSHITA (1.Semiconductor Materials Engineering Dept. Toshiba Corporation)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PB7-7] Effect of Silicon Wafer In-Situ Cleaning on the Structure of Ultrathin Silicon Oxide Films

Naozumi TERADA、Hiroki OGAWA、Kazunori MORIKI、Akinobu TERAMOTO、Koji MAKIHARA、Mizuho MORITA、Tadahiro OHMI、Takeo HATTORI (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology、2.Department of Electronics, Tohoku University)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PB7-8] Infrared Characterization of SiO2 Ultra Thin Film by Grazing Internal Reflection

Masanori OKUYAMA、Yuichi MATSUI、Yasuo MIYAGAWA、Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-1] High Performance Poly-Si TFT for LCDs

Hiroyuki OHSHIMA、Shinji MOROZUMI (1.SEIKO EPSON Corporation)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-2] LC/Polymer Composite Light Valves Addressed by Poly Si TFTs for Video Projector

Masanori YUKI (1.R & D Center, Asahi Glass Co., Ltd.)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-3] Application of a-Si Diodes in LC-TV Displays

K. E. Kuijk (1.Philips Research Laboratories)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-4] Polysilicon Thin Film Transistor Material and Device Technologies

A. Chiang、I-W. Wu、M. Hack、A. G. Lewis、T. Y. Huang、C-C. Tsai (1.Xerox Palo Alto Research Center)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-5] Excimer Laser Annealed poly-Si TFTs for CMOS Circuits

K. Sera、H. Asada、F. Okumura、H. Tanabe、K. Nakamura、A. Tada、S. Kaneko (1.Functional Devices Research Laboratories Opto-Electronics Research Laboratories NEC Corporation)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-6] Evaluation of Hydrogenation Effect in Poly-Si TFT with Charge Pumping Method

K. Hata、Y. Baba、H. Mori、I-Wei Wu、A. G. Lewis、M. Koyanagi (1.Research Center for Integrated Systems, Hiroshima University、2.Xerox Co. Palo Alto Research Center)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-A-7] A New Type of TFT Based on a Polymeric Semiconductor

Hiroyuki FUCHIGAMI、Akira TSUMURA、Hiroshi KOEZUKA (1.Mitsubishi Electric Corporation, Materials & Electronic Devices Laboratory)

1991 International Conference on Solid State Devices and Materials |PDF ダウンロード

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