[3P61-75] Poster Session [Radiation sources and applications]

[3P67] Development of Soft X-Ray Laser Irradiation Beamline for Damage Examination of Soft X-Ray/EUV Optics

*Masahiko Ishino¹, Thanh-Hung Dinh¹, Noboru Hasegawa¹, Masaharu Nishikino¹ (1. National Institutes for Quantum and Radiological Science and Technology(Japan))