2:30 PM - 2:45 PM
〇Kenji Ishikawa1, Makoto Sekine1, Toshio Hayashi1, Masaru Hori1, Yasuhiro Horiike2 (1.Nagoya University, 2.Tsukuba University)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)
Hisataka Hayashi(TOSHIBA), Koji Eriguchi(Kyoto Univ.)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
2:30 PM - 2:45 PM
〇Kenji Ishikawa1, Makoto Sekine1, Toshio Hayashi1, Masaru Hori1, Yasuhiro Horiike2 (1.Nagoya University, 2.Tsukuba University)
2:45 PM - 3:00 PM
〇Yusuke Fukunaga1, Takayoshi Tsutsumi1, Keigo Takeda1, Kenji Ishikawa1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
3:00 PM - 3:15 PM
〇(D)Nobuya Nakazaki1, Daisuke Fukushima1, Hiroki Miyata1, Hirotaka Tsuda1, Yoshinori Takao1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
3:15 PM - 3:30 PM
〇(M1)Kentaro Nishida1, Yukimasa Okada1, Yoshinori Takao2, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ., 2.Yokohama National Univ.)
3:30 PM - 3:45 PM
〇Makoto Satake1,2, Masaki Yamada1 (1.Hitachi High-Tech., 2.Osaka Univ.)
3:45 PM - 4:00 PM
〇Akiko Hirata1, Masanaga Fukasawa1, Takushi Shigetoshi1, Masaki Okamoto1, Kazunori Nagahata1, Hu Li2, Satoshi Hamaguchi2, Tetsuya Tatsumi1 (1.Sony corp., 2.Osaka Univ.)
4:15 PM - 4:30 PM
〇Yuji Kasashima1, Fumihiko Uesugi1 (1.AIST)
4:30 PM - 4:45 PM
〇Toru Tsunoura1, Katsumi Yoshida1, Toyohiko Yano1 (1.Tokyo Tech.)
4:45 PM - 5:00 PM
〇(M1)Naoki Yoshitake1, Kenji Ishikawa1, Makoto Sekine1, Keigo Takeda1, Hiroki Kondo1, Masaru Hori1 (1.Nagoya Univ.)
5:00 PM - 5:15 PM
〇Toshio Hayashi1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
5:15 PM - 5:30 PM
〇Tomohiro Kubota1, Hiroshi Ito2, Momoji Kubo2, Seiji Samukawa1,3 (1.IFS, Tohoku Univ., 2.IMR, Tohoku Univ., 3.WPI-AIMR, Tohoku Univ.)
5:30 PM - 5:45 PM
Muneyuki Satou1, Yasuhiro Morikawa1, 〇Takahide Murayama1, Noriaki Tani1, Yoneda Masahiro1 (1.ULVAC, Inc.)
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