Oral presentation

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

Sun. Mar 20, 2016 9:15 AM - 10:30 AM KD (KD)

Hiroshi Akatsuka(Titech)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:15 AM - 9:30 AM

[20a-KD-1] [Young Scientist Presentation Award Speech] Diagnostics of interfacial water structure supplied with plasma-generated reactive species by vibrational sum-frequency generation spectroscopy

〇Takahiro Kondo^1,2, Tsuyohito Ito² (1.Tokai Univ., 2.Osaka Univ.)

9:30 AM - 9:45 AM

△ [20a-KD-2] Quantification of N₂ Rotational Temperature Distribution obtained by Spectral Imaging

〇(M1)Ryo Sasamoto¹, Takao Matsumoto¹, Hideaki Orii¹, Yasuji Izawa¹, Kiyoto Nishijima¹ (1.Fukuoka Univ.)

9:45 AM - 10:00 AM

△ [20a-KD-3] Development of Microwave Mini-Probe for Electron Density Measurement

〇(B)Masaya Hotta¹, Daisuke Ogawa¹, Keiji Nakamura¹, Hideo Sugai¹ (1.Chubu Univ.)

10:00 AM - 10:15 AM

△ [20a-KD-4] High accuracy temperature measurement of silicon substrate in high-powert impulse magnetron sputtering process using low-coherence interferometry

〇(M1)Katsuhiro Hattori¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Tech., 3.Nagoya Univ.)

10:15 AM - 10:30 AM

[20a-KD-5] Gas ratio dependency of GaN damage on argon-chlorine plasma

〇Yoshitsugu Banno¹, Daisuke Ogawa¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (1.Chubu Univ.)

Poster presentation

[21p-P4-1~3] 8.2 Plasma measurements and diagnostics

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P4 (Gymnasium)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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1:30 PM - 3:30 PM

▼ [21p-P4-1] Effect of Electrode Material to Gerdien Condenser Current-Voltage Characteristics

〇(DC)Camille Corrales Lacdan¹, Motoi Wada¹ (1.Doshisha Univ)

1:30 PM - 3:30 PM

[21p-P4-2] Diagnosis of Ar/CH₄ Plasmas for Diamond-like Carbon Films using Mass Spectrometry

〇SHUN FUKAI¹, ODA AKINORI¹, KOUSAKA HIROYUKI², OHTA TAKAYUKI³ (1.Chiba Inst. Technol., 2.Nagoya Univ., 3.Meijo Univ.)

1:30 PM - 3:30 PM

[21p-P4-3] Optical Diagnostics of Atmospheric-Pressure Mist Plasma

〇masanao tsumaki¹, Tsuyohito Ito¹ (1.Osaka Univ.)

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

[20a-KD-1] [Young Scientist Presentation Award Speech] Diagnostics of interfacial water structure supplied with plasma-generated reactive species by vibrational sum-frequency generation spectroscopy

△ [20a-KD-2] Quantification of N₂ Rotational Temperature Distribution obtained by Spectral Imaging

△ [20a-KD-3] Development of Microwave Mini-Probe for Electron Density Measurement

△ [20a-KD-4] High accuracy temperature measurement of silicon substrate in high-powert impulse magnetron sputtering process using low-coherence interferometry

[20a-KD-5] Gas ratio dependency of GaN damage on argon-chlorine plasma

[21p-P4-1~3] 8.2 Plasma measurements and diagnostics

▼ [21p-P4-1] Effect of Electrode Material to Gerdien Condenser Current-Voltage Characteristics

[21p-P4-2] Diagnosis of Ar/CH₄ Plasmas for Diamond-like Carbon Films using Mass Spectrometry

[21p-P4-3] Optical Diagnostics of Atmospheric-Pressure Mist Plasma

Authentication

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

[20a-KD-1] [Young Scientist Presentation Award Speech] Diagnostics of interfacial water structure supplied with plasma-generated reactive species by vibrational sum-frequency generation spectroscopy

△ [20a-KD-2] Quantification of N2 Rotational Temperature Distribution obtained by Spectral Imaging

△ [20a-KD-3] Development of Microwave Mini-Probe for Electron Density Measurement

△ [20a-KD-4] High accuracy temperature measurement of silicon substrate in high-powert impulse magnetron sputtering process using low-coherence interferometry

[20a-KD-5] Gas ratio dependency of GaN damage on argon-chlorine plasma

[21p-P4-1~3] 8.2 Plasma measurements and diagnostics

▼ [21p-P4-1] Effect of Electrode Material to Gerdien Condenser Current-Voltage Characteristics

[21p-P4-2] Diagnosis of Ar/CH4 Plasmas for Diamond-like Carbon Films using Mass Spectrometry

[21p-P4-3] Optical Diagnostics of Atmospheric-Pressure Mist Plasma

Authentication

△ [20a-KD-2] Quantification of N₂ Rotational Temperature Distribution obtained by Spectral Imaging

[21p-P4-2] Diagnosis of Ar/CH₄ Plasmas for Diamond-like Carbon Films using Mass Spectrometry