9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Hu Li1, Kentaro Yamada1, Tomoko Ito1, Satoshi Numazawa2, Ken Machida2, Kiyoshi Ishikawa2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Samsung R&D Institute Japan)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Fri. Mar 17, 2017 9:00 AM - 11:30 AM 313 (313)
Koji Eriguchi(Kyoto Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Kazuhiro Karahashi1, Hu Li1, Kentaro Yamada1, Tomoko Ito1, Satoshi Numazawa2, Ken Machida2, Kiyoshi Ishikawa2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Samsung R&D Institute Japan)
9:15 AM - 9:30 AM
〇(M1)Gento Kuroda1, Kazuo Takahashi1, Koji Nishio1 (1.Kyoto Inst. Technol.)
9:30 AM - 9:45 AM
〇Toshinari Ueyama1, Keigo Takeda1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori2, Manabu Iwata3, Yoshinobu Ohya3 (1.Nagoya Univ. Eng., 2.Nagoya Univ. Inst. Innovation for Future Society, 3.Tokyo Electron Miyagi Ltd.)
9:45 AM - 10:00 AM
〇Naoki Takeda1, Yan Zhang1, Toshio Hayashi1, Makoto Sekine1, Keigo Takeda1, Hiroki Kondo1, Kenji ishikawa1, Masaru Hori2 (1.Nagoya Univ. Eng., 2.Nagoya Univ. Inst. Innovation for Future Society)
10:00 AM - 10:15 AM
〇Masato Imamura1, Liu Zecheng1, Pan Jialin1, Nanide Atsushi3, Ishikawa Kenzi1, Takeda Keigo1, Kondo Hiroki1, Oda Osamu1, Sekine Makoto1, Hori Masaru2 (1.Nagoya Univ., 2.Nagoya Univ. Inst. Innovation for Future Society, 3.SCREEN Holdings)
10:15 AM - 10:30 AM
〇Kenichi Yoshikawa1, Atsuki Asano2, Yudai Miyawaki2, Kazuhito Furumoto1, Toshiyuki Sasaki1, Keisuke Kikutani1, Hisataka Hayashi1, Makoto Sekine2, Masaru Hori2 (1.Toshiba Corp., 2.Nagoya Univ.)
10:30 AM - 10:45 AM
〇HU LI1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony)
10:45 AM - 11:00 AM
〇HU LI1, Pascal Friederich2, Karin Fink2, Wolfgang Wenzel2, Kazuhiro Karahashi1, Masanaga Fukasawa3, Kazunori Nagahata3, Tetsuya Tatsumi3, Satoshi Hamaguchi1 (1.Osaka Univ., 2.KIT, 3.Sony)
11:00 AM - 11:15 AM
〇Shuichi Noda1, Wataru Mizubayashi2, Akiou Kikuchi1, Kazuhiko Endo2, Seiji Samukawa1,2 (1.Tohoku Univ., 2.AIST)
11:15 AM - 11:30 AM
〇RYOKO SUGANO1, MICHIRO ISOBE2, SATOSHI HAMAGUCHI2 (1.Hitachi R&D Group, 2.Osaka Univ.)
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