Symposium (Oral)
Symposium (technical) » Latest trend on atomic layer processes
Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)
Makoto Sekine(Nagoya Univ.), Takeshi Momose(Univ. of Tokyo), Kazuhiro Karahashi(Osaka univ.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 2:00 PM
〇Yukihiro Shimogaki1 (1.The Univ. Tokyo)
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2:00 PM - 2:30 PM
〇Toyohiro Chikyo1, Hiori Kino1 (1.NIMS)
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2:30 PM - 3:00 PM
〇Tadashi Mitsunari1,2, Toshiki Sato1, Yusuke Suzuki1, Michitaka Kikuchi1, Munehito Kagaya1, Yoshinori Morisada1, Hitoshi Yonemichi3, Hironori Moki3, Tsuyoshi Moriya1 (1.Tokyo Electron Technology Solutions Ltd., 2.Center for Low-temperature plasma Sciences, 3.Tokyo Electron Ltd.)
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3:00 PM - 3:30 PM
Kensaku Kanomata2, Masanori Miura2, 〇Fumihiko Hirose1 (1.Yamagata Univ., 2.ROEL, Yamagata Univ.)
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3:45 PM - 4:15 PM
〇Kazuhiro Karahashi1, Tomoko Ito1, Satoshi Hamaguchi1 (1.osaka univ.)
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4:15 PM - 4:30 PM
〇(M1)Kota Uematsu1, Noriaki Toyoda1 (1.Univ. of Hyogo)
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4:30 PM - 4:45 PM
〇Masaki Hasegawa1, Takayoshi Tsutsumi2, Hiroki Kondo2, Makoto Sekine2, Kenji Ishikawa2, Masaru Hori2 (1.Nagoya Univ., 2.Center for Low-temperature Plasma Sciences, Nagoya Univ.)
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4:45 PM - 5:15 PM
〇Masaru Izawa1 (1.Hitachi High-Tech)
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5:15 PM - 5:30 PM
〇Kazuya Nakane1, Rene H. J. Vervuurt2,3, Takayoshi Tsutsumi3, Nobuyoshi Kobayashi3, Masaru Hori3 (1.Nagoya Univ. Eng., 2.ASM Japan K.K., 3.Center for Low-temperature Plasma Sciences, Nagoya univ.)
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5:30 PM - 5:45 PM
〇Akiko Hirata1, Masanaga Fukasawa1, Katsuhisa Kugimiya1, Kohjiro Nagaoka1, Kazuhiro Karahashi2, Satoshi Hamaguchi2 (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)
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