Kiyotaka Horikawa¹, Hiroshi Kawarada^1,2,3, 〇Atsushi Hiraiwa^2,4 (1.FSE, Waseda Univ., 2.RONLI, Waseda Univ., 3.KMLMST, Waseda Univ., 4.IMaSS, Nagoya Univ.)

〇Keito Aoshima¹, Masahiro Horita^1,2, Jun Suda^1,2, Tamotsu Hashizume³ (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.RCIQE, Hokkaido Univ.)

〇(M1)Erika Maeda^1,2, Toshihide Nabatame², Masafumi Hirose^1,2, Mari Inoue², Akihiko Ohi², Naoki Ikeda², Koji Shiozaki³, Hajime Kiyono¹ (1.SIT, 2.NIMS, 3.NU)

〇Hidetoshi Mizobata¹, Yuhei Wada¹, Sanshiro Kaga¹, Mikito Nozaki¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ.)

〇Yuto Ando^1,6, Tohru Nakamura², Manato Deki², Noriyuki Taoka¹, Hirotaka Watanabe², Atsushi Tanaka^2,3, Shugo Nitta², Yoshio Honda², Hisashi Yamada⁶, Mitsuaki Shimizu^2,6, Hiroshi Amano^2,3,4,5 (1.Dept. of Electronics, Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.NIMS, 4.ARC, Nagoya Univ., 5.VBL, Nagoya Univ., 6.AIST GaN-OIL)

〇(M1C)Yuta Kurosaki¹, Okumura Hironori¹ (1.Tsukuba Univ.)

〇(M1C)Kyonosuke Danjo¹, Ryo Mizutani¹, Keiji Yamamoto¹, Takashi Egawa¹ (1.NITech)

〇(B)Kazufumi Hirukawa¹, Hideki Sakurai^1,2,3, Hajime Fujikura⁴, Masahiro Horita^1,2, Michal Bockowski^2,5, Yohei Otoki⁴, Tetsu Kachi², Jun Suda^1,2 (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.ULVAC ISET, 4.SCIOCS, 5.UNIPRESS)

〇Hideki Sakurai^1,2,3, Tetsuo Narita⁴, Kazufumi Hirukawa², Shinji Yamada^1,2,3, Akihiko Koura³, Keita Kataoka⁴, Masahiro Horita^1,2, Michal Bockowski^1,5, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET, 4.ToyotaCentralR&DLabs, 5.UNIPRESS)

〇(B)Takuya Nakashima¹, Hideki Sakurai^1,2,3, Sigeo Arai², Kenji Iwata¹, Tetsuo Narita⁴, Keita Kataoka⁴, Michal Bockowski^2,5, Masahiro Nagao², Jun Suda¹, Tetsu Kachi², Nobuyuki Ikarashi² (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.ULVAC ISET, 4.Toyota Central R&D Labs., 5.Unipress)