Oral presentation

[10p-N307-1~14] 7.1 X-ray technologies

Fri. Sep 10, 2021 1:30 PM - 5:15 PM N307 (Oral)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Tadashi Hatano(Tohoku Univ.), Akio Yoneyama(SAGA Light Source)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:30 PM - 1:45 PM

[10p-N307-1] Development of CO₂ laser-produced plasma beyond EUV source for next generation semiconductor lithography

〇Takeshi Higashiguchi¹, Ryosuke Kaneda¹, Yuto Nakayama¹, Juri Ogawa¹, Hiromu Kawasaki¹ (1.Utsunomiya Univ.)

1:45 PM - 2:00 PM

[10p-N307-2] Charge-separated energy spectra of highly charged ions from EUV source

Hiromu 1Kawasaki¹, Yuto Nakayama¹, Takeru Niinuma¹, Masaki Kume¹, 〇Takeshi Higashiguchi¹ (1.Utsunomiya Univ.)

2:00 PM - 2:15 PM

[10p-N307-3] Feasibility study of high brightness source in 6-nm spectral region

Shamit Roy¹, Yuto Nakayama¹, Hiromu Kawasaki¹, 〇Takeshi Higashiguchi¹ (1.Utsunomiya Univ.)

2:15 PM - 2:30 PM

[10p-N307-4] Modeling of the atomic structure and EUV emission wavelength from the multiple charged ion of heavy elements

〇Akira Sasaki¹ (1.KPSI, QST)

2:30 PM - 2:45 PM

[10p-N307-5] Development of high-groove-density laminar-type diffraction grating for Fe L-emission analysis

〇Tadashi Hatano^1,2, Masato Koike^2,3,4, Alexander S. Pirozhkov³, Tsubasa Kakio⁵, Nobukazu Hayashi⁵, Hiroyuki Sasai⁵, Tetsuya Nagano⁵, Masami Terauchi² (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST, 4.Eng., Osaka City Univ., 5.Device Dept., Shimadzu Corp.)

2:45 PM - 3:00 PM

[10p-N307-6] Interferometric Wavefront Measurement on Three-Mirror Objective for EUV Microscopy

〇(M1)Yusuke Tsukui¹, Shuntaro Waki¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

3:00 PM - 3:15 PM

[10p-N307-7] High irradiance illuminator for transmission extreme ultraviolet microscopy

〇(M2)Shuntarou Waki¹, Tsukui Yusuke¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

3:15 PM - 3:30 PM

[10p-N307-8] Stimulated emission in soft X-ray excited luminescence of Eu:GGG

〇Takeo Ejima^1,2, Ryosuke Kaneda³, Yuto Nakayama³, Juri Ogawa³, Toshitaka Wakayama⁴, Takeshi Higashiguchi³ (1.SRIS Tohoku Univ., 2.IMRAM Tohoku Univ., 3.Utsunomiya Univ., 4.Saitama Med. Univ.)

3:45 PM - 4:00 PM

[10p-N307-9] Advances of Measurement Technique for Hard X-ray Photoelectron Spectroscopy in BL09XU of SPring-8

〇Akira Yasui¹, Yasumasa Takagi¹, Taito Osaka², Michihiro Sugahara², Yasunori Senba¹, Haruhiko Ohashi^1,2, Naomi Kawamura¹, Kyo Nakajima^1,2, Koji Motomura², Kenji Tamasaku^1,2, Yusuke Tamenori¹, Makina Yabashi^1,2 (1.JASRI, 2.RIKEN SPring-8)

4:00 PM - 4:15 PM

[10p-N307-10] Development of fast X-ray imager “HAYAKA” and its application for sub-sec X-ray computed tomography

〇Akio Yoneyama¹, Rika Baba^2,1, Masahide Kawamoto¹ (1.SAGA Light Source, 2.Hitachi)

4:15 PM - 4:30 PM

[10p-N307-11] High Energy X-ray Phase Imaging of Dry Batteries by Talbot-Lau Interferometer with Structured Anode X-ray Source

〇Kenji Kimura¹, Ryosuke Ueda², Haojie Pan¹, Atsushi Momose² (1.Tohoku Univ., 2.IMRAM Tohoku Univ.)

4:30 PM - 4:45 PM

[10p-N307-12] Dynamic visualization of laser processing using Talbot interferometer

〇Ryosuke Ueda¹, Kenji Kimura¹, Hidekazu Takano², Masato Hoshino², Atsushi Momose¹ (1.Tohoku Univ., 2.JASRI)

4:45 PM - 5:00 PM

[10p-N307-13] Laboratory-Based Pixel Super-Resolution X-Ray Phase Imaging System with Triangular Phase Grating II

〇Ryosuke Ueda¹, Zhuoxuan Zhao¹, Atsushi Momose¹, Hiroki Kawakami², Pouria Zangi³, Martin Borner³, Otto Markus⁴, Joachim Schulz⁴ (1.Tohoku Univ., 2.Hamamatsu Photonics, 3.Karlsruhe Inst. Technology, 4.microworks)

5:00 PM - 5:15 PM

[10p-N307-14] Evaluation of X-ray spectroscopic performance in large-area CMOS image sensors

〇Junko Hiraga¹, Daito Yuhi¹, Takeru Fujii¹, Akihiro Yoshida¹, Hiroshi Nakajima², Daisuke Yonetoku³, Makoto Arimoto³, Naoki Ogino³, Tatsuya Sawano³ (1.Kwansei Gakuin Univ., 2.Kanto Gakuin Univ., 3.Kanazawa Univ.)

Sessions

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies