[S-B-6] Thermal Desorption of Native Oxides Formed on Si(111) during Chemical Treatments

Y. KOBAYASHI, Y. SHINODA, K. SUGII (1.NTT Electrical Communications Laboratories)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-7] A Non-Destructive Surface and Interface Study of Very-Thin-Film/Substrate Contact Systems Using Soft X-ray Spectroscopy

Motohiro IWAMI, Masaaki HIRAI, Masahiko KUSAKA, Hatsuo NAKAMURA, Fumio AKAO (1.Research Laboratory for Surface Science, Faculty of Science, Okayama University, 2.Osaka Electro-Communication University, 3.Department of Electronic Engineering, Okayama University of Science)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-8] Particle Deposition Mechanism onto Si Wafer

A. Saito, K. Ohta, M. Watanabe, H. Oka (1.Production Engineering Research Laboratory, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-9] Reduction of Interface States of MOS Structure Using Photo-CVD SiO2 Film by F2 Treatment

Masakazu NAKAMURA, Masanori OKUYAMA, Yoshihiro HAMAKAWA (1.Department of Electrical Engineerirg, Faculty of Engineering Science, Osaka University)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-10] Characterization of Si-SiO2 Interfaces Formed after Photo-Excited Cleaning

Rinshi SUGINO, Ritsuo TAKIZAWA, Yasuhisa SATO, Takashi ITO (1.FUJITSU LABORATORIES LTD.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-11] Reverse-Bias Current Reduction in Low-Temperature-Annealed pn Junctions Using a UHV Ion-Implanter

Y. Ishihara, A. Okita, K. Yoshikawa, T. Shibata, T. Ohmi, T. Nitta, J. Sugiura, N. Ohwada (1.Department of Electronics Faculty of Engineering Tohoku University, 2.Device Development Center, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-B-12] Outgas-Free, Corrosion-Free Metal Surfaces for ULSI Manufacturing

K. Sugiyama, T. Ohmi, N. Miki, Y. Nakahara (1.Department of Electronics, Faculty of Engineering, Tohoku University, 2.R&D Division, Hashimoto Chemical Ltd., 3.Technical Center, Osaka Sanso Kogyo Co., Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-C-1] GaAs/AlGaAs Optical Interconnection Chip for Neural Network

Yoshikazu NITTA, Jun OHTA, Kazumasa MITSUNAGA, Masanobu TAKAHASHI, Syuichi TAI, Kazuo KYUMA (1.Mitsubishi Electric Corporation, Central Research Laboratory)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-C-2] Vertical to Surface Transmission Electro-Photonic Device for the Application of Optical Interconnection and Processing

Kenichi KASAHARA, Yoshiharu TASHIRO, Ichiro OGURA, Mitunori SUGIMOTO, Shigeru KAWAI, Keiichi KUBOTA (1.Opto-Electronics Res. Labs., NEC Corporation)

1989 Conference on Solid State Devices and Materials |PDF Download

[S-C-3] Module Assembly Technology for Optical Multi-Interconnection Devices -InP Based 4x4 Optical Switch-

Takeshi KATO, Fumio YUUKI, Hiroaki INOUE, Ken'ichi MIZUISHI, Koji ISHIDA (1.Central Research Laboratory, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF Download