[A-1-4] The Importance of H2O2 Decomposition in Silicon Surface Cleaning

H. F. Schmidt、M. Meuris、P. W. Mertens、A. L. P. Rotondaro、M. M. Heyns、T. Q. Hurd、Z. Hatcher (1.IMEC、2.Texas Instruments、3.Ashland Chemical)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-5] An Inexpensive Diffusion Barrier Technology for Polycide Gate Electrodes with an SiN Layer Formed with ECR Nitrogen Plasma

Tetsuo Hosoya、Katsuyuki Machida、Kazuo Imai、Eisuke Arai (1.NTT LSI Laboratories)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-1] Metal Removal from a Silicon Surface by UV Irradiation in Pure Water

Mokuji KAGEYAMA、Moriya MIYASHITA、Hiroyasu KUBOTA (1.Semiconductor Materials Engineering Dept., TOSHIBA corporation)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-2] Cleaning Technology and Analysis Technology for Hydrocarbon Contamination on Si Wafer Surface

Naomichi YONEKAWA、Sinichi YASUI、Tadahiro OHMI (1.Department of Electronics, Faculty of Engineering, Tohoku University)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-3] ESTM/AFM Observations on Si(111) in Several Solutions

Atsushi ANDO、Kazushi MIKI、Tetsuo SHIMIZU、Kazuhiko MATSUMOTO、Yukinori MORITA、Hiroshi TOKUMOTO (1.Electrotechnical Laboratory (ETL)、2.National Institute for Advanced Interdisciplinary Research (NAIR))

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-4] Quantum Chemical Investigation of Metal Adsorption Mechanism onto Silicon Surface in Cleaning Solution

Moriya MIYASHITA、Hiroyasu KUBOTA、Yoshiaki MATSUSHITA Reiko YOSHIMURA、Tsukasa TADA (1.Semiconductor Materials Engineering Dept., Toshiba Corporation、2.Research and Development Center, Toshiba Corporation)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-5] Effects of Dissolved Oxygen in HF Solution on Silicon Surface Morphology

Hiroki OGAWA、Kenji ISHIKAWA、Miki T. SUZUKI、Yuka HAYAMI、Shuzo FUJIMURA (1.Process Development Div. C850 FUJITSU Limited)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-1] Bloch Oscillations in Semiconductor Superlattices

H. G. ROSKOS、C. WASCHKE、K. VICTOR、H. KURZ (1.Institut fur Halbleitertechinik II, Institut fur Theoretische Physik B, Rheinisch-Westfalische Technische Hochschule (RWTH) Aachen)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-2] Current Oscillation with an InAs/AlSb Resonant-Tunneling Diode Measured at 77K

Kanji Yoh Hisaki Kawahara、Masataka Inoue (1.Research Center for Interface Quntum Electronics, Hokkaido University、2.Department of Electrical Engineering, Osaka Institute of Technology)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-3] Large Electron Transfer and Strong Negative Differential Resistance in Strained InGaAs Channel Real-Space Transfer Transistors

Jiun-Tsuen Lai、Joseph Ya-min Lee (1.Department of Electrical Engineering and Materials Science Center, Tsing-Hua University)

1994 International Conference on Solid State Devices and Materials |PDF ダウンロード

340件中(141 - 150)

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