[LD-11] Effects of Grown-in Hydrogen on Electrical Properties of Czochralski Silicon Crystals

Akito Hara, Masaaki Koizuka, Hiroshi Yamada-Kaneta, Haruhisa Mori (1.Fujitsu Limited)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-12] Oxygen Precipitate Density Control in CZ-Si Wafers by Hydrogen Annealing Process

K. Izunome, H. Shirai, K. Kashima, J. Yoshikawa, A. Hojo (1.Toshiba Ceramics R&D Center, 2.Toshiba Ceramics Silicon Division)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-13] Element Specific Diagnosis Using μ-PCD

L. Koster, P. Blochl, L. Fabry (1.Wacker-Chemitronic GmbH)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-14] Photovoltaic Investigations of Interband Transitions in SiGe/Si Multiple Quantum Wells

Jian-bao Wang, Fang Lu, Heng-hui Sun Da-wei Gong, Xun Wang (1.Fudan T. D. Lee Physics Laboratory, Fudan University, 2.Surface Physics Laboratory, Fudan University)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-15] A Novel Trench Capping Process Using CMP with Endpoint Detection

Hiroshi Inokawa, Masayasu Miyake, Satoshi Nakayama, Toshio Kobayashi (1.NTT LSI Laboratories)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-16] High Speed Fully Depleted CMOS/SIMOX Gate Array

Xing Zhang, Liqiong Wei, Yingxue Li, Yangyuan Wang (1.Institute of microelectronics, Peking University)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-17] Low-Temperature Drain Current Characteristics in Sub-10-min-Thick SOI nMOSFET's on SIMOX Substrates

Yasuhisa Omura, Masao Nagase (1.NTT LSI Laboratories)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-18] ON-Current Stability of Poly-Si Thin Film Transistor with Si-rich Oxide as Intermetal Dielectric Film after Negative Bias Temperature Stress

Gug-Seon Choi, Jin-Ho Choi, Yoon-Jong Lee, Jong-Wan Nam, Sook-Rak Ma, Kyung-Sik Chang, Jong-Sub Yoon, Hee-Koo Yoon (1.Semiconductor R&D Lab. 1, Hyundai Electronics Industries Co., Ltd.)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-19] A Novel Lateral IGBT Structure with Improving the Dynamic Latch-up Performances

Hitoshi Sumida, Atsuo Hirabayashi (1.Advanced Device Technology Laboratory, Fuji Electric R&D, Ltd.)

1994 International Conference on Solid State Devices and Materials |PDF Download

[LD-20] A Novel Fabrication Method for Short Channel MOSFET's Using Self-Aligned Ultrashallow Junction Formation by Selective Si1-xGex CVD

Kinya GOTO, Junichi MUROTA, Fumitaka HONMA, Takashi MATSUURA, Yasuji SAWADA (1.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

1994 International Conference on Solid State Devices and Materials |PDF Download

340 results (331 - 340)

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